2

Properties of atomic layer deposited HfO2 thin films

Year:
2009
Language:
english
File:
PDF, 1.28 MB
english, 2009
11

Charge generation during oxidation of thin Hf metal films on silicon

Year:
2006
Language:
english
File:
PDF, 171 KB
english, 2006
12

Deposition of yttrium oxide thin films in supercritical carbon dioxide

Year:
2008
Language:
english
File:
PDF, 950 KB
english, 2008
44

Atomic Layer Deposition of HfO2 Thin Films on Si and GaAs Substrates

Year:
2008
Language:
english
File:
PDF, 156 KB
english, 2008
46

Stability and Surface Reactivity of Anatase TiO2 Films

Year:
2015
Language:
english
File:
PDF, 1.27 MB
english, 2015